Image Deposition Overview for Microsystems

This learning module is an introduction to the common processes used to deposit thin films for the fabrication of micro-size devices.  Thermal oxidation and several types of deposition are discussed.  Activities provide further exploration into these processes as well as the properties and applications of the thin films deposited.

Please register and login to our website to access the instructor materials and the .doc and .ppt files.

 

Login Form