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Folder MEMS Fabrication

This Category includes the following Fabrication Topics in MEMS and Microsystems for download.

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Folder Crystallography for Microsystems

This learning module introduces the science of crystallography and its importance to microtechnology and the fabrication of microelectromechanical systems (MEMS).  Four activities are provided that allow you to further explore several concepts of this science and "see" the formation of crystals and crystal planes. 

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Folder Deposition Overview for Microsystems

This learning module is an introduction to the common processes used to deposit thin films for the fabrication of micro-size devices.  Thermal oxidation and several types of deposition are discussed.  Activities provide further exploration into these processes as well as the properties and applications of the thin films deposited.

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Folder Photolithography Overview for Microsystems

This learning module provides an overview of the most common photolithography process used for the fabrication of microelectromechanical systems (MEMS), its terminology and basic concepts.  Activities allow you to further explore some of these concepts.

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Folder Etch Overview for Microsystems

This learning module introduces the most common etch processes used for the fabrication of microsystems.  Activities allow you to demonstrate your understanding of the terminology and basic concepts of these processes.

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Folder MEMS Micromachining Overview

This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems).  Activities are provided that contribution to a better understanding of these processes and that encourage further exploration.

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Folder MTTC Pressure Sensor Process

This unit outlines the individual sub-processes necessary to create the micro pressure sensor manufactured at the Manufacturing Training & Technology Center (MTTC) at the University of New Mexico. This process is used during a 3-day workshop at the MTTC. However, is can be used in the classroom to illustrate a complete process for a MEMS device.

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Folder MEMS: Making Micro Machines

This learning module is based on the film MEMS: Making Micro Machine which covers MEMS applications, fabrication, packaging and design.

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