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Folder MEMS Micromachining Overview

This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems).  Activities are provided that contribution to a better understanding of these processes and that encourage further exploration.

Please register and login to our website to access the instructor materials and the .doc and .ppt files.

 

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Folder MEMS Micromachining Overview for Instructors

This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems).  Activities are provided that contribution to a better understanding of these processes and that encourage further exploration.

Please register and login to our website to access the instructor materials and the .doc and .ppt files.

 

Folder MEMS Micromachining Overview for Participants

This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems).  Activities are provided that contribution to a better understanding of these processes and that encourage further exploration.

Please register and login to our website to access the instructor materials and the .doc and .ppt files.

 

Folder MEMS Micromachining Overview Presentations

Please register and login to our website to access the instructor materials and the .doc and .ppt files.

 

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