Folder MEMS Micromachining Overview
This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems). Activities are provided that contribution to a better understanding of these processes and that encourage further exploration.
Please register and login to our website to access the instructor materials and the .doc and .ppt files.
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Folder MEMS Micromachining Overview for Instructors
This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems). Activities are provided that contribution to a better understanding of these processes and that encourage further exploration.
Please register and login to our website to access the instructor materials and the .doc and .ppt files.
Folder MEMS Micromachining Overview for Participants
This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems). Activities are provided that contribution to a better understanding of these processes and that encourage further exploration.
Please register and login to our website to access the instructor materials and the .doc and .ppt files.
Folder MEMS Micromachining Overview Presentations
Please register and login to our website to access the instructor materials and the .doc and .ppt files.
